Features
■ Useful at extreme low temperatures
■ Viscosity is less than 20 cSt at -120°C

Applications
■ Semiconductor heat transfer:
■ Ion implanters
■ Dry etchers
■ CVD/PVD tools
■ Electronic Automated Test Equipment (ATE)
■ Industrial/Pharmaceutical heat transfer:
■ Chemical reactors
■ Freeze dryer
■ VOC capture
■ CryopumpsElectronic Cooling:
■ Supercomputers
■ Sensitive military electronics
■ High voltage transformers
■ Electronics:
■ Reliability testing
■ Temperature calibration
■ Autocascade refrigeration:
■ HCFC-123 replacement
■ Medical Lab:
■ Histobath working fluid Technical Data | November 2020