Realizes high yield thin wafer processing

The DFM2800 is a specialized wafer mounter for inclusion in an inline

system with a backgrinder to process ø300

m ultra-thin wafers. It

mounts wafers that have been thinned with the DGP8761 system onto

dicing tape or tape frames and removes the front side protection tape

in a stable process. It also supports the attachment of DAF with

integrated dicing tape, which is necessary for next generation SiP

(System in Package) manufacturing

.

Supports ultrathin wafers less than 25

m

thick

To support the thinning requirements of ø300

m wafers less than 25

μ

m thick, the breakage risk of ultra-thin wafers is minimized by

reducing the number of wafer handling steps to only twenty percent

that of the existing unit. In addition, a cleaning mechanism has been

installed at each handling pad/table to prevent wafer breakage caused

by particle intrusion.

DFM2800

Realizes faster processing of ultrathin wafers

Fully Automatic Multifunction Wafer Mounter

High throughput

By optimizing each handling unit, an approximate 50 % increase* is

realized in the maximum throughput for continuous operation. This

greatly contributes to an improvement in productivity. (Compared to the

DFM2700)

*The actual throughput depends on the wafer mount process time and surface protection tape

peeling time.

Robust options to support various needs



Robot/single load port unit when using the DFM2800 as a stand-

alone unit



Internal precut mechanism for dicing tape



Adhesion tape peeling mechanism for surface protection tape



Wafer surface ID recognition mechanism (vision system) for

barcode control after wafer mounting

Easy operation

While the equipment operation method is inherited from the DFM2700,

the screen size is larger with better visibility to for a user-friendly and

easy to understand operational environment. Furthermore, in an in-line

system with a DGP8761, the DFM2800 is even easier to use because

of unified management, which makes recipe selection and start/stop on

the DFM2800 possible from the DGP8761.

DGP8761

DFM2800