CMOSens SFC6000D / SFM6000D Mass Flow Controller / Meter for Gases

www.sensirion.com/sfc6000

Jan 2023 – v. 0.1

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4 Flow units

SFC6000D and SFM6000D are calibrated in “standard units” – namely slm (standard liter per minute). Table 4 lists

other common units used for measuring gas flow and a relationship between them. If your device appears to show

c.a. 7% error vs your reference, it is possible the reference is displaying flow in “norm” units.

Flow unit

Reference condition

Gas Temperature

Gas Pressure

slm

(standard liter per minute)

sccm

(standard centimeter cube per minute)

20 °C / 68° F

1013 mbar / 14.69 psi

ln/min

(norm liter per minute)

mln / min (norm mililiter per minute)

0 °C / 32° F

Example:

10 slm (20°C / 68°F, 1013 mbar)

=

9.32 ln/min ln/min (0°C, 1013 mbar)

5 OEM options

SFC6000D and SFM6000D mass flow controllers / meters are all special versions of Sensirion’s SFC6000 and

SFM6000 platform. SFC6000D and SFM6000D were designed as distribution products to meet a wide range of

needs. In case SFC6000D or SFM6000D does not meet exactly the requirements for a given application, Sensirion

recommends looking at SFC6000 and SFM6000 mass flow controllers / meters, which are available with a variety

of configurations (fittings, flow ranges, calibrations, interfaces) and are generally built on order. SFC6000 and

SFM6000 also allow for OEM product development in the context of high-volume projects. Below, a few OEM

options are listed. Please do not hesitate to contact Sensirion AG to discuss your requirements.

Example OEM options for hardware:

 Analog voltage. Profibus and other available on request

 Downmount / threaded fittings. Plastic and metal available

 Metal body

 Alternative sealing materials (e.g. EPDM / FFKM)

OEM options for calibration:

 Multi-gas calibration (allows switching between a set of gas calibrations saved in the device memory)

 New gas calibrations

6 Ordering codes

Article

Description

Article number

SFC6000D-5slm

Digital mass flow controller 5 – 0.01 slm flow range

3.000.900

SFC6000D-20slm

Digital mass flow controller 20 - 0.04 slm flow range

3.000.901

SFC6000D-50slm

Digital mass flow controller 50 - 0.1 slm flow range

3.000.902

SFM6000D-5slm

Digital mass flow meter 5 – 0.01 slm flow range

3.000.897

SFM6000D-20slm

Digital mass flow meter 20 - 0.04 slm flow range

3.000.898

SFM6000D-50slm

Digital mass flow meter 50 - 0.1 slm flow range

3.000.899

EK-F5x

Plug-and-play evaluation kit (without mass flow meter / controller) 3.000.912

Table 4: Common units used to express gas flow rates.

Table 5: Products in SFC6000D and SFM6000D series and a compatible evaluation kit.