aerotech.com

MPS50SL SERIES SPECIFICATIONS

Mechanical Specifications

MPS50SL-025

MPS50SL-050

Travel

25 mm

50 mm

Accuracy

1.0 mm/rev Ball

Screw

Uncalibrated

±6 µm

±8 µm

Calibrated(1)

±1.5 µm

0.5 mm/rev Lead

Screw

Uncalibrated

±10 µm

±12 µm

Calibrated(1)

±2.0 µm

±2.5 µm

Resolution

(Minimum Incremental Motion)

1.0 mm/rev Ball Screw

0.1 µm

0.5 mm/rev Lead Screw

0.1 µm

Repeatability (Bi-Directional)(1)

1.0 mm/rev Ball Screw

±0.75um

0.5 mm/rev Lead Screw

±1.5 µm

Straightness

±2.0 µm

±3.0 µm

Flatness

±2.0 µm

±3.0 µm

Maximum Speed

1.0 mm/rev Ball

Screw

DC Motor (-M1)

5 mm/s

Stepper Motor (-M2)

1 mm/s

0.5 mm/rev Lead

Screw

DC Motor (-M1)

2.5 mm/s

Stepper Motor (-M2)

0.5 mm/s

Load Capacity(2)

Horizontal

5 kg

Side

5 kg

Vertical

2.5 kg

Stage Mass

0.85 kg

0.9 kg

Material

Anodized Aluminum Body

Notes:

1. With Aerotech controllers.

2. Payload specifications are single-axis system.

3. Excessive duty cycle may impact stage accuracy.

4. Specifications are for single-axis systems, measured 25 mm above the tabletop.

MPS50SL load curves.

MPS50SL with MPS75SL in a dual-axis XY configuration.