www.keithley.com

1.888.KEITHLEY (U.S. only)

A Greater Measure of Confidence

VolTaGE MEasurEMENT aCCuraCY (4-WIrE sENsE)3

range

Max. resolution

Input2

resistance

accuracy (23°C ± 5°C)

1 Year, ±(%rdg + volts)

200.000 mV

1 µV

>1016

W

0.012% + 350 µV

2 .00000

V

10 µV

>1016

W

0.012% + 350 µV

20.0000

V

100 µV

>1016

W

0.015% +

1.5 mV

200.000

V

1 mV

>1016

W

0.015% + 10 mV

TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0.15

× accuracy specification)/°C.

aDDITIoNal MEasurE sPECIfICaTIoNs

OUTPUT SETTLING TIME (typical to 10% of final value): <2s, 1pA and 10pA ranges; <50ms,

100pA through 10nA ranges; <5ms, 100nA through 100mA ranges .

CURRENT NOISE: When observed over 1 minute intervals, peak to peak noise will be within

400aA (typical) during 90% of the intervals using Autofilter (5s 10% to 90% rise time), with triax

connectors capped, Autozero OFF, Source Delay = 0, on the 1pA range for at least 3 minutes.

CurrENT MEasurEMENT aCCuraCY (2- or 4-WIrE sENsE)4

range

Max.

resolution

Voltage

burden5

accuracy

(23°C ± 5°C)

1 Year

±(%rdg + amps)

1.00000 pA

10 aA

< 1mV

1.0

% +

7 fA

10.0000 pA

100 aA

< 1mV

0.50 % +

7 fA

100.000 pA

1 fA

< 1mV

0.15 % + 30 fA

1.00000 nA

10 fA

< 1mV

0.050 % + 200 fA

10.0000 nA

100 fA

< 1mV

0.050 % +

2 pA

100.000 nA

1 pA

< 1mV

0.050 % + 20 pA

1.00000 µA

10 pA

< 1mV

0.050 % + 300 pA

10.0000 µA

100 pA

< 1mV

0.050 % +

2 nA

100.000 µA

1 nA

< 1mV

0.025 % +

6 nA

1.00000 mA

10 nA

< 1mV

0.027 % + 60 nA

10.0000 mA

100 nA

< 1mV

0.035 % + 600 nA

100.000 mA

1 µA

< 1mV

0.055 % +

6 µA

TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±[(0.15

× accuracy specification) +

1fA]/°C .

INPUT CURRENT: <3fA at 23°C, <40% RH; typically ±0.5fA/°C around 23°C, <40% RH .

CoNDENsED MEasurE sPECIfICaTIoNs 1

rEsIsTaNCE MEasurEMENT aCCuraCY (4-WIrE sENsE WITH rEMoTE PrEaMP)

Source I Mode, Auto Ohms

Normal accuracy

Enhanced accuracy

Max.

Default

(23°C ± 5°C)

(23°C ± 5°C) 7

range

resolution

Test Current

1 Year, ±(%rdg + ohms)

1 Year, ±(%rdg + ohms)

<2 .00000

W 6

1 µ

W

—

Source I

ACC + Measure VACC

Measure I

ACC + Measure VACC

20.0000

W

100 µ

W

100 mA

0.098% + 0.003

W

0.068% + 0.001

W

200.000

W

1 m

W

10 mA

0.077% +

0.03

W

0.048% +

0.01

W

2 .00000 k

W

10 m

W

1 mA

0.066% +

0.3

W

0.040% +

0.1

W

20.0000 k

W

100 m

W

100 µA

0.063% +

3

W

0.038% +

1

W

200.000 k

W

1

W

10 µA

0.082% +

30

W

0.064% +

10

W

2 .00000 M

W

10

W

1 µA

0.082% +

300

W

0.064% +

100

W

20.0000 M

W

100

W

1 µA

0.085% +

1 k

W

0.067% +

500

W

200.000 M

W

1 k

W

100 nA

0.085% +

10 k

W

0.068% +

5 k

W

2 .00000 G

W

10 k

W

10 nA

0.085% +

100 k

W

0.070% +

50 k

W

20.0000 G

W

100 k

W

1 nA

0.085% +

1 M

W

0.070% +

500 k

W

200.000 G

W

1 M

W

100 pA

0.205% +

10 M

W

0.185% +

5 M

W

2 .00000 T

W

10 M

W

10 pA

0.822% +

100 M

W

0.619% +

50 M

W

20.0000 T

W

100 M

W

1 pA

2 .06%

+

1 G

W

1.54% +

500 M

W

>20.0000 T

W 6

—

—

Source I

ACC + Measure VACC

Measure I

ACC + Measure VACC

TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0.15

× accuracy specification)/°C.

SOURCE I MODE, MANUAL OHMS: Total uncertainty = I source accuracy + V measure accuracy

(4-wire sense).

SOURCE V MODE: Total uncertainty = V source accuracy + I measure accuracy (4-wire sense).

6-WIRE OHMS MODE: Available using active ohms guard and guard sense (mainframe rear panel

ONLY). Max. Guard Output Current: 50 mA . Accuracy is load dependent . Refer to manual for

calculation formula .

MAINFRAME GUARD OUTPUT RESISTANCE: 0.1

W in ohms mode.

NoTEs

1. Speed = 10 PLC, Autofilter ON, properly zeroed and settled .

2 . Source I mode, I = 0 .

3. Voltage measurement accuracy is not affected by the remote preamp.

4 . Current measurement accuracy is not affected by the remote preamp; however, the 1pA through 100nA ranges

are available only when using a preamp.

5. 4-wire mode .

6 . Manual ohms mode only.

7. Source readback enabled, offset compensation ON . Source delay must be programmed such that the source is

fully settled for each reading .

6430

Sub-Femtoamp Remote

SourceMeter® SMU Instrument