A Greater Measure of Confidence

www.keithley.com

1.888.KEITHLEY (U.S. only)

CoNDENsED sourCE sPECIfICaTIoNs4

VolTaGE ProGraMMING aCCuraCY (4-WIrE sENsE)5

accuracy (1 Year)

Noise

Programming

23°C ±5°C

(peak-peak)

range

resolution

±(% rdg. + volts)

0.1Hz – 10Hz

200.000 mV

5 µV

0.02% + 600 µV

5 µV

2 .00000 V

50 µV

0.02% + 600 µV

50 µV

20.0000 V

500 µV

0.02% + 2 .4 mV

500 µV

200.000 V

5 mV

0.02% + 24 mV

5 mV

TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0.15

× accuracy specification)/°C.

MAX. OUTPUT POWER: 2 .2W (four quadrant source or sink operation).

SOURCE/SINK LIMITS: ±21V @ ±105mA, ±210V @ ±10.5mA .

VOLTAGE REGULATION: Line: 0.01% of range. Load: 0.01% of range + 100µV.

NOISE 10Hz–1MHz (p-p): 10mV.

OVER VOLTAGE PROTECTION: User selectable values, 5% tolerance. Factory default = None.

CURRENT LIMIT: Bipolar current limit (compliance) set with single value. Min . 0.1% of range.

CurrENT ProGraMMING aCCuraCY (WITH rEMoTE PrEaMP)

accuracy (1 Year)4

Noise

Programming

23°C ±5°C

(peak-peak)

range

resolution

±(% rdg. + amps)

0.1Hz – 10Hz

1.00000 pA

50 aA

1.0

% + 10 fA

5 fA

10.0000 pA

500 aA

0.50 % + 30 fA

10 fA

100.000 pA

5 fA

0.15 % + 40 fA

20 fA

1.00000 nA

50 fA

0.050 % + 200 f A

50 fA

10.0000 nA

500 fA

0.050 % +

2 pA

500 fA

100.000 nA

5 pA

0.050 % + 20 pA

3 pA

1.00000 µA

50 pA

0.050 % + 300 pA

20 pA

10.0000 µA

500 pA

0.050 % +

2 nA

200 pA

100.000 µA

5 nA

0.031 % + 20 nA

500 pA

1.00000 mA

50 nA

0.034 % + 200 nA

5 nA

10.0000 mA

500 nA

0.045 % +

2 µA

50 nA

100.000 mA

5 µA

0.066 % + 20 µA

500 nA

TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0.15

× accuracy specification)/°C.

MAX. OUTPUT POWER: 2 .2W (four quadrant source or sink operation).

SOURCE/SINK LIMITS: ±10.5mA @ ±210V, ±105mA @ ±21V .

CURRENT REGULATION: Line: 0.01% of range. Load: 0.01% of range + 1fA .

VOLTAGE LIMIT: Bipolar voltage limit (compliance) set with single value. Min . 0.1% of range.

CoNDENsED sYsTEM sPEEDs

NoTEs

1. Reading rates applicable for voltage or current measurements . Auto zero off, autorange off, filter off, display

off, trigger delay = 0, source auto clear off, and binary reading format .

2 . Pass/Fail test performed using one high limit and one low math limit .

3. Includes time to re-program source to a new level before making measurement .

4 . For sink mode, 1pA to 100mA range, accuracy is ±(0 .15% + offset*4).

5. Voltage source accuracies are not affected by the remote preamp.

GENEral

Noise rejection:

NPlC

NMrr

CMrr

Fast

0.01

—

80 dB

Medium

0.1

—

80 dB

Normal

1

60 dB

90 dB

LOAD IMPEDANCE: Stable into 20,000pF on the 100mA through 100µA ranges, 470pF on the

10µA and 1µA ranges, and 100pF on the nA and pA ranges. Refer to the User’s Manual for

details on measuring large capacitive loads.

COMMON MODE VOLTAGE: ±42VDC maximum .

COMMON MODE ISOLATION: >109

W, <1000pF.

OVERRANGE: 105% of range, source and measure.

MAX. VOLTAGE DROP BETWEEN INPUT/OUTPUT AND SENSE TERMINALS: 5V. (To meet

specified accuracy with 4-wire sense, refer to the User’s Manual .)

MAX. SENSE LEAD RESISTANCE: 10W for rated accuracy.

SENSE INPUT RESISTANCE: 1M

W.

MAINFRAME GUARD OFFSET VOLTAGE: 300µV, typical .

PREAMP GUARD OFFSET VOLTAGE: 1mV, typical .

PREAMP GUARD OUTPUT RESISTANCE: 110k

W.

SOURCE OUTPUT MODES: Fixed DC level, Memory List (mixed function), Stair (linear

and log).

SOURCE MEMORy LIST: 100 points max .

MEMORy BUFFER: 5,000 readings @ 5½ digits (two 2,500 point buffers). Includes

selected measured value(s) and time stamp . Lithium battery backup (3 yr+ battery life).

DIGITAL INTERFACE:

Safety Interlock: Active low input .

Handler Interface: Start of test, end of test, 3 category bits . +5V @ 300mA supply.

Digital I/O: 1 trigger input, 4 TTL/Relay Drive outputs (33V @ 500mA sink, diode

clamped).

PROGRAMMABILITy: IEEE-488 (SCPI-1995.0), RS-232, 5 user-definable power-up states plus

factory default and *RST.

POWER SUPPLy: 100V–240V rms, 50–60Hz (automatically detected at power up),

100VA max .

EMC: Conforms with European Union Directive 89/336/EEC EN 55011, EN 50082-1, EN 61000-

3-2 and 61000-3-3, FCC part 15 class B .

SAFETy: Conforms with European Union Directive 73/23/EEC EN 61010-1.

VIBRATION: MIL-PRF-28800F, Class 3.

WARM-UP: 1 hour to rated accuracies .

DIMENSIONS: 89mm high

× 213mm wide × 370mm deep (3½ in × 83⁄8 in × 149⁄16 in). Bench

Configuration (with handle and feet): 104mm high

× 238mm wide × 370mm deep (41⁄8 in

× 93⁄8 in × 149⁄16 in).

Amplifier: 20mm high

× 57mm wide × 97mm deep (0.783 in × 2.225 in × 3.75 in).

WEIGHT: 5.9kg (13 lbs).

ENVIRONMENT: Operating: 0°–40°C, 60% R .H . (non-condensing) up to 35°C . Derate 5%

R .H ./°C, 35°–40°C . Storage: –25°C to 65°C . Non-condensing humidity.

MEasurEMENT1

MAXIMUM RANGE CHANGE RATE: 75/second .

SINGLE READING OPERATION READING RATES (rdg/second) FOR 60Hz (50Hz):

speed

NPlC/

Trigger origin

Measure

To GPIb

source-

Measure3

To GPIb

source-Measure

Pass/fail Test2, 3

To GPIb

Fast

0.01 / internal

256 (256)

83 (83)

83 (83)

Medium

0.10 / internal

181 (166)

73 (70)

73 (70)

Normal

1.00 / internal

49 (42)

35 (31)

34 (30)

6430

Sub-Femtoamp Remote

SourceMeter® SMU Instrument