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MPS-GR SERIES SPECIFICATIONS

Notes:

1. Requires -PL2 metrology option.

2. Payload specifications are single-axis system.

3. Excessive duty cycle may impact stage accuracy.

4. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

* With Aerotech control system.

Mechanical Specifications

MPS50GR

MPS75GR

Travel

360° Continuous

Accuracy-Calibrated(1)

80 arc sec

Resolution (Minimum Incremental

Motion)

DC Servomotor (-M1)

2 arc sec

1 arc sec

Stepper Motor (-M2)

2 arc sec

1 arc sec

Unidirectional Repeatability

DC Servomotor (-M1)

8 arc sec

6 arc sec

Stepper Motor (-M2)

20 arc sec

10 arc sec

Tilt Error Motion

40 arc sec

Worm Gear Ratio

80:1

100:1

Maximum Speed

DC Servomotor (-M1)

23 deg/s

180 deg/s

Stepper Motor (-M2)

4.5 deg/s

100 deg/s

Aperture

20 mm

30 mm

Maximum Torque (Continuous)

0.4 N•m

0.6 N•m

Load Capacity(2)

Axial

4 kg

12 kg

Radial

1 kg

5 kg

Moment

0.25 N•m

1.5 N•m

Rotor Inertia (Unloaded)

0.000031 kg•m2

0.000141 kg•m2

Stage Mass

0.8 kg

1.7 kg

Material

Anodized Aluminum Body

Electrical Specifications

MPS50GR

MPS75GR

Drive System

DC Servomotor (-M1): DC Brush Servomotor with 14:1

Gearbox

Stepper Motor (-M2): 24 VDC Bipolar Stepper Motor

with 43:1 Gearbox

DC Servomotor (-M1): DC Brush Servomotor

Stepper Motor (-M2): 24 VDC Bipolar Stepper Motor

Feedback

DC Servomotor (-M1): 512 lines/rev Rotary Encoder

Stepper Motor (-M2): N/A

DC Servomotor (M1): 10,000 lines/rev Rotary Encoder

Stepper Motor (-M2 ): N/A

Electronic Resolution

DC Servomotor (-M1): 0.565 arc sec (0.000157°)

Stepper Motor (-M2): 0.785 arc sec (0.000218°)

@ 480 steps/rev motor resolution

DC Servomotor (-M1): 0.324 arc sec (0.00009°)

Stepper Motor (-M2): 0.324 arc sec (0.00009°)

@ 40000 steps/rev motor resolution

Maximum Bus Voltage

DC Servomotor (-M1) 48 VDC

Stepper Motor (-M2): 48 VDC*

Home Marker

Optical Switch